New Tool for MOCVD Carrier Characterization

k-Space Associates introduced the kSA Emissometer, its newest addition to an extensive line of in-situ, in-line, and ex-situ thin-film analysis tools for semiconductor, surface sciences, and photovoltaic industries. The new tool provides MOCVD fabs with essential wafer carrier characterization, such as emissivity uniformity and defect identification.

MOCVD fabs usually rely on subjective human tests to inspect the quality of wafer carriers. The kSA Emissometer has the advantage of high resolution carrier emissivity mapping and detection of defects and microcracks that aren’t visible to the human eye. This tool provides full quantitative carrier maps in 10 minutes.

The kSA Emissometer also provides fabs with systematic carrier data that can be integrated into their quality control processes as well as a go-no-go decision on carrier use and quantitative determination of the carrier emissivity, allowing for temperature set-point adjustments for individual carriers.

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